VERTICAL-CAVITY SURFACE-EMITTING LASERS FABRICATED BY VACUUM INTEGRATED PROCESSING

被引：5

作者：

CHOQUETTE, KD ^{[1
]}

HASNAIN, G ^{[1
]}

MANNAERTS, JP ^{[1
]}

WYNN, JD ^{[1
]}

WETZEL, RC ^{[1
]}

HONG, M ^{[1
]}

FREUND, RS ^{[1
]}

LEIBENGUTH, RE ^{[1
]}

机构：

[1] AT&T BELL LABS,BREINIGSVILLE,PA 18031

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1992年 / 4卷 / 09期

关键词：

D O I：

10.1109/68.157112

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the novel fabrication of vertical-cavity surface-emitting lasers (VCSEL's) using vacuum processing techniques. The upper monolithic distributed Bragg reflector around the laser cavity is dry etched down to the top of the active region, followed by in situ contact deposition on the mesa sidewall, providing a short current path through the p-type mirror. These etched VCSEL's exhibit lower series resistance, lower threshold voltage, greater thermal dissipation, and higher maximum output power than conventional planar VCSEL's made from the same material.

引用

收藏

页码：951 / 954

页数：4

相关论文

共 13 条

[1] GAAS VERTICAL-CAVITY SURFACE EMITTING LASERS FABRICATED BY REACTIVE ION ETCHING [J].

CHOQUETTE, KD ;

HASNAIN, G ;

WANG, YH ;

WYNN, JD ;

FREUND, RS ;

CHO, AY ;

LEIBENGUTH, RE .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1991, 3 (10) :859-862

[2] INSITU DEPOSITION OF AU ON PLASMA-PREPARED GAAS SUBSTRATES [J].

CHOQUETTE, KD ;

HONG, M ;

MANNAERTS, JP ;

SICONOLFI, DJ ;

FRANKENTHAL, RP ;

BAIOCCHI, FA ;

WETZEL, RC ;

FREUND, RS .

JOURNAL OF ELECTRONIC MATERIALS, 1992, 21 (01) :17-21

[3]

CHOQUETTE KD, UNPUB

[4]

CHOQUETTE KD, IN PRESS J VAC SCI T

[5] LOW THRESHOLD PLANARIZED VERTICAL-CAVITY SURFACE-EMITTING LASERS [J].

GEELS, RS ;

CORZINE, SW ;

SCOTT, JW ;

YOUNG, DB ;

COLDREN, LA .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1990, 2 (04) :234-236

[6] PERFORMANCE OF GAIN-GUIDED SURFACE EMITTING LASERS WITH SEMICONDUCTOR DISTRIBUTED BRAGG REFLECTORS [J].

HASNAIN, G ;

TAI, K ;

YANG, L ;

WANG, YH ;

FISCHER, RJ ;

WYNN, JD ;

WEIR, B ;

DUTTA, NK ;

CHO, AY .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1991, 27 (06) :1377-1385

[7] HIGH-TEMPERATURE AND HIGH-FREQUENCY PERFORMANCE OF GAIN-GUIDED SURFACE EMITTING LASERS [J].

HASNAIN, G ;

TAI, K ;

DUTTA, NK ;

WANG, YH ;

WYNN, JD ;

WEIR, BE ;

CHO, AY .

ELECTRONICS LETTERS, 1991, 27 (11) :915-916

[8] A SIMPLE WAY TO REDUCE SERIES RESISTANCE IN P-DOPED SEMICONDUCTOR DISTRIBUTED BRAGG REFLECTORS [J].

HONG, M ;

MANNAERTS, JP ;

HONG, JM ;

FISCHER, RJ ;

TAI, K ;

KWO, J ;

VANDENBERG, JM ;

WANG, YH ;

GAMELIN, J .

JOURNAL OF CRYSTAL GROWTH, 1991, 111 (1-4) :1071-1075

[9] HIGH-EFFICIENCY (1.2MW/MA) TOP-SURFACE-EMITTING GAAS QUANTUM-WELL LASERS [J].

LEE, YH ;

TELL, B ;

BROWNGOEBELER, K ;

JEWELL, JL ;

LEIBENGUTH, RE ;

ASOM, MT ;

LIVESCU, G ;

LUTHER, L ;

MATTERA, VD .

ELECTRONICS LETTERS, 1990, 26 (16) :1308-1310

[10] EFFECTS OF ETCH DEPTH AND ION-IMPLANTATION ON SURFACE EMITTING MICROLASERS [J].

LEE, YH ;

JEWELL, JL ;

TELL, B ;

BROWNGOEBELER, KF ;

SCHERER, A ;

HARBISON, JP ;

FLOREZ, LT .

ELECTRONICS LETTERS, 1990, 26 (04) :225-227