PULSED LASER SYNTHESIS OF TITANIUM SILICIDES USING A Q-SWITCHED ND - GLASS-LASER

被引：4

作者：

DANNA, E

LEGGIERI, G

LUCHES, A

LUBY, S

ZEMEK, J

机构：

[1] SLOVAK ACAD SCI, EPRC, INST PHYS, CS-84228 BRATISLAVA, CZECHOSLOVAKIA

[2] CZECHOSLOVAK ACAD SCI, INST PHYS, CS-18040 PRAGUE 8, CZECHOSLOVAKIA

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1989年 / 48卷 / 06期

关键词：

D O I：

10.1007/BF00617850

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：503 / 507

页数：5

共 9 条

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[3] CHROMIUM SILICIDE FORMATION UNDER PULSED HEAT-FLOW [J].

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[4] METAL SILICIDES WITH ENERGETIC PULSES [J].

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[5]

DANNA E, 1988, APPL PHYS A, V45, P93

[6] PROCESSING OF TITANIUM FILMS ON SILICON USING A Q-SWITCHED RUBY-LASER [J].

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HEMMENT, PLF ;

STEPHENS, KG .

THIN SOLID FILMS, 1986, 144 (02) :289-296

[7] RESISTIVITIES OF THIN-FILM TRANSITION-METAL SILICIDES [J].

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[8]

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[9]

SUNI I, 1983, THIN SOLID FILMS, V42, P233

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