SCANNING SURFACE HARMONIC MICROSCOPY - APPLICATION TO SILICON AND LANGMUIR-BLODGETT-FILMS ON SILICON

The scanning surface harmonic microscope is a local probe method in which a microwave signal is applied across a tip-sample tunneling gap generating higher harmonics, which can Thus this microscope is sensitive to nonlinearities in the tip-sample junction. In Si and other semiconductors it is sensitive to nonlinearities in the tip-sample capacitance voltage characteristics (C/V). Such a local C/V has been used to delineate regions of different dopant type and concentration in n(+)/p silicon gratings. On Langmuir-Blodgett films of dielectrics, such as docosanoic acid on Si, the scanning surface harmonic microscope is sensitive to changes in film thickness which cause shifts in the C/V characteristics of the underlying Si.