THE WAVE-GUIDE SURFATRON - A HIGH-POWER SURFACE-WAVE LAUNCHER TO SUSTAIN LARGE-DIAMETER DENSE-PLASMA COLUMNS

被引：79

作者：

MOISAN, M ^{[1
]}

CHAKER, M ^{[1
]}

ZAKRZEWSKI, Z ^{[1
]}

PARASZCZAK, J ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1987年 / 20卷 / 11期

关键词：

D O I：

10.1088/0022-3735/20/11/009

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1356 / 1361

页数：6

共 12 条

[1]

CHAKER M, 1982, J PHYS LETT-PARIS, V43, pL71, DOI 10.1051/jphyslet:0198200430307100

[2] MICROWAVE AND RF SURFACE-WAVE SUSTAINED DISCHARGES AS PLASMA SOURCES FOR PLASMA CHEMISTRY AND PLASMA PROCESSING [J].

CHAKER, M ;

MOISAN, M ;

ZAKRZEWSKI, Z .

PLASMA CHEMISTRY AND PLASMA PROCESSING, 1986, 6 (01) :79-96

[3] ON THE SUPPLY AND MEASUREMENT OF POWER IN MICROWAVE INDUCED PLASMAS [J].

HUBERT, J ;

MOISAN, M ;

ZAKRZEWSKI, Z .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1986, 41 (03) :205-215

[4] GENERATION OF A STEADY-STATE OVERDENSE PLASMA BY MICROWAVES NEAR THE DIPOLE RESONANCE OF A COAXIAL DISCHARGE DEVICE [J].

KAMPMANN, B .

ZEITSCHRIFT FUR NATURFORSCHUNG SECTION A-A JOURNAL OF PHYSICAL SCIENCES, 1979, 34 (04) :423-429

[5]

MARGOTCHAKER J, 1987, INT C PHENOMENA IONI, V2, P854

[6] PROPERTIES AND APPLICATIONS OF SURFACE-WAVE PRODUCED PLASMAS [J].

MOISAN, M ;

FERREIRA, CM ;

HAJLAOUI, Y ;

HENRY, D ;

HUBERT, J ;

PANTEL, R ;

RICARD, A ;

ZAKRZEWSKI, Z .

REVUE DE PHYSIQUE APPLIQUEE, 1982, 17 (11) :707-727

[7] A WAVEGUIDE-BASED LAUNCHER TO SUSTAIN LONG PLASMA COLUMNS THROUGH THE PROPAGATION OF AN ELECTROMAGNETIC SURFACE-WAVE [J].

MOISAN, M ;

ZAKRZEWSKI, Z ;

PANTEL, R ;

LEPRINCE, P .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1984, 12 (03) :203-214

[8] EXPERIMENTAL INVESTIGATIONS OF THE PROPAGATION OF SURFACE-WAVES ALONG A PLASMA-COLUMN [J].

MOISAN, M ;

SHIVAROVA, A ;

TRIVELPIECE, AW .

PLASMA PHYSICS AND CONTROLLED FUSION, 1982, 24 (11) :1331-1400

[9] THEORY AND CHARACTERISTICS OF AN EFFICIENT SURFACE-WAVE LAUNCHER (SURFATRON) PRODUCING LONG PLASMA COLUMNS [J].

MOISAN, M ;

ZAKRZEWSKI, Z ;

PANTEL, R .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1979, 12 (02) :219-&

[10]

MOISAN M, 1987, RAD PROCESSES DISCHA, P381

← 1 2 →