KINETICS AND MECHANISM FOR DESORPTION OF H2O FROM SPIN-ON-GLASS

In this study, the rate equation is considered for outgassing of H2O from spin-on-glass during heating cycles. Also considered is the identity of the film species which desorbs. Previous studies have provided processing engineering information about how much the samples must be heated to desorb the water and how long the samples can be exposed to room temperature before readsorption. In this study, residual gas analyzer thermal analysis data are analyzed using methods suggested recently in the technical literature and it is determined that the desorption reaction is second order with an activation energy of approximately 19 kcal/mol. Using Fourier-transform infrared, it is shown that the desorption reaction which gives off the H2O during heating involves the reduction of near-neighbor hydrogen bonded silanols to produce Si-O-Si and a water molecule.