APPLICATIONS OF DIAMOND-LIKE CARBON THIN-FILMS

被引：38

作者：

LETTINGTON, AH

机构：

来源：

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 1993年 / 342卷 / 1664期

关键词：

D O I：

10.1098/rsta.1993.0022

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

There is considerable interest in growing diamond layers and thin films for a wide range of applications. Some of these thin film requirements can be met already using existing diamond-like carbon coatings. This paper reviews the use of diamond-like carbon films in infra red optical, mechanical, electronic and biomedical applications.

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页码：287 / 290

页数：4

相关论文

共 45 条

[11]

DRUMMETER LF, 1964, PHYS THIN FILMS, V2, P305

[12] FRICTIONAL-PROPERTIES OF DIAMOND-LIKE CARBON LAYERS [J].

ENKE, K ;

DIMIGEN, H ;

HUBSCH, H .

APPLIED PHYSICS LETTERS, 1980, 36 (04) :291-292

[13]

GREEN GW, 1980, Patent No. 2069008

[14] INHOMOGENEOUS CARBON BONDING IN HYDROGENATED AMORPHOUS-CARBON FILMS [J].

GRILL, A ;

MEYERSON, BS ;

PATEL, VV ;

REIMER, JA ;

PETRICH, MA .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) :2874-2877

[15]

GRILL A, 1989, P SOC PHOTO-OPT INS, V969, P52

[16]

Hahn R.E., 1978, PHYS THIN FILMS, V10, P1

[17] DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J].

HOLLAND, L ;

OJHA, SM .

THIN SOLID FILMS, 1976, 38 (02) :L17-L19

[18] GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA [J].

HOLLAND, L ;

OJHA, SM .

THIN SOLID FILMS, 1979, 58 (01) :107-116

[19] OPTICAL-PROPERTIES AND STRUCTURE OF AMORPHOUS SILICON FILMS PREPARED BY CVD [J].

JANAI, M ;

ALLRED, DD ;

BOOTH, DC ;

SERAPHIN, BO .

SOLAR ENERGY MATERIALS, 1979, 1 (1-2) :11-27

[20] THE EFFECTS OF HYDROGENATION ON THE PROPERTIES OF ION-BEAM SPUTTER DEPOSITED AMORPHOUS-CARBON [J].

JANSEN, F ;

MACHONKIN, M ;

KAPLAN, S ;

HARK, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :605-609

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