SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS

被引:223
作者
ENKE, K
机构
关键词
D O I
10.1016/0040-6090(81)90226-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:227 / 234
页数:8
相关论文
共 38 条
[21]   COLOR CHART FOR DIAMOND-LIKE CARBON-FILMS ON SILICON [J].
MORAVEC, TJ .
THIN SOLID FILMS, 1980, 70 (01) :L9-L10
[22]  
NORSTROM H, 1979, VIDE, V196, P11
[23]   GROWTH-KINETICS AND PROPERTIES OF HARD AND INSULATING CARBONACEOUS FILMS GROWN IN AN RF DISCHARGE [J].
OJHA, SM ;
NORSTROM, H ;
MCCULLUCH, D .
THIN SOLID FILMS, 1979, 60 (02) :213-225
[24]   SOME CHARACTERISTICS OF HARD CARBONACEOUS FILMS [J].
OJHA, SM ;
HOLLAND, L .
THIN SOLID FILMS, 1977, 40 (JAN) :L31-L32
[25]  
OJHA SM, 1977, 7TH P INT VAC C 3RD, P1667
[26]  
SCHMELLENMEIER H, 1955, Z PHYS CHEM, V205, P349
[27]  
Schmellenmeier H, 1953, EXP TECH PHYS, V1, P49
[28]   REACTIVE PULSE PLASMA CRYSTALLIZATION OF DIAMOND AND DIAMOND-LIKE CARBON [J].
SOKOLOWSKI, M ;
SOKOLOWSKA, A ;
GOKIELI, B ;
MICHALSKI, A ;
RUSEK, A ;
ROMANOWSKI, Z .
JOURNAL OF CRYSTAL GROWTH, 1979, 47 (03) :421-426
[29]   ION-BEAM-DEPOSITED POLYCRYSTALLINE DIAMONDLIKE FILMS [J].
SPENCER, EG ;
SCHMIDT, PH ;
JOY, DC ;
SANSALONE, FJ .
APPLIED PHYSICS LETTERS, 1976, 29 (02) :118-120
[30]  
Strel'nitskii V. E., 1978, Soviet Physics - Technical Physics, V23, P222