SOLAR-CELLS MADE BY LASER-INDUCED DIFFUSION DIRECTLY FROM PHOSPHINE GAS

被引：29

作者：

TURNER, GB ^{[1
]}

TARRANT, D ^{[1
]}

POLLOCK, G ^{[1
]}

PRESSLEY, R ^{[1
]}

PRESS, R ^{[1
]}

机构：

[1] XMR INC,SANTA CLARA,CA 95051

来源：

APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 12期

关键词：

D O I：

10.1063/1.92628

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：967 / 969

页数：3

共 9 条

[1] PROPERTIES OF LASER-ASSISTED DOPING IN SILICON [J].

AFFOLTER, K ;

LUTHY, W ;

VONALLMEN, M .

APPLIED PHYSICS LETTERS, 1978, 33 (02) :185-187

[2] DYNAMICS OF Q-SWITCHED LASER ANNEALING [J].

AUSTON, DH ;

GOLOVCHENKO, JA ;

SIMONS, AL ;

SURKO, CM ;

VENKATESAN, TNC .

APPLIED PHYSICS LETTERS, 1979, 34 (11) :777-779

[3] EFFICIENT SI SOLAR-CELLS BY LASER PHOTOCHEMICAL DOPING [J].

DEUTSCH, TF ;

FAN, JCC ;

TURNER, GW ;

CHAPMAN, RL ;

EHRLICH, DJ ;

OSGOOD, RM .

APPLIED PHYSICS LETTERS, 1981, 38 (03) :144-146

[4] LASER PROCESSING IN THE PREPARATION OF SILICON SOLAR-CELLS [J].

MULLER, JC ;

FOGARASSY, E ;

SALLES, D ;

STUCK, R ;

SIFFERT, PM .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (04) :815-821

[5] P-N-JUNCTION FORMATION IN BORON-DEPOSITED SILICON BY LASER-INDUCED DIFFUSION [J].

NARAYAN, J ;

YOUNG, RT ;

WOOD, RF ;

CHRISTIE, WH .

APPLIED PHYSICS LETTERS, 1978, 33 (04) :338-340

[6] LASER-INDUCED DIFFUSION BY IRRADIATION OF SILICON DIPPED INTO AN ORGANIC SOLUTION OF THE DOPANT [J].

STUCK, R ;

FOGARASSY, E ;

MULLER, JC ;

HODEAU, M ;

WATTIAUX, A ;

SIFFERT, P .

APPLIED PHYSICS LETTERS, 1981, 38 (09) :715-717

[7] PULSED LASER TECHNIQUES FOR SOLAR-CELL PROCESSING [J].

YOUNG, RT ;

WOOD, RF ;

NARAYAN, J ;

WHITE, CW ;

CHRISTIE, WH .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (04) :807-815

[8] ELECTRICAL AND STRUCTURAL CHARACTERISTICS OF LASER-INDUCED EPITAXIAL LAYERS IN SILICON [J].

YOUNG, RT ;

NARAYAN, J ;

WOOD, RF .

APPLIED PHYSICS LETTERS, 1979, 35 (06) :447-449

[9]

YOUNG RT, 1978, 1ST EUR COMM PHOT SO, P861

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