PARAMETRIC MODELING AT RESIST-SUBSTRATE INTERFACES

被引：12

作者：

OCOLA, LE ^{[1
]}

CERRINA, F ^{[1
]}

机构：

[1] UNIV WISCONSIN,DEPT ELECT & COMP ENGN,MADISON,WI 53705

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587415

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3986 / 3989

页数：4

共 13 条

[1] MOLECULAR-WEIGHT DEPENDENCE OF DEVELOPED CONTOURS IN POLY-(METHYL METHACRYLATE) ELECTRON RESISTS [J].

ATODA, N ;

KOMURO, M ;

KAWAKATSU, H .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) :3707-3712

[2] FABRICATION OF SUB-10 NM STRUCTURES BY LIFT-OFF AND BY ETCHING AFTER ELECTRON-BEAM EXPOSURE OF POLY(METHYLMETHACRYLATE) RESIST ON SOLID SUBSTRATES [J].

CHEN, W ;

AHMED, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06) :2519-2523

[3]

CHEN Y, 1994, J VAC SCI TECHNOL B, V12, P4013

[4] REDUCTION AND ELIMINATION OF PROXIMITY EFFECTS [J].

DOBISZ, EA ;

MARRIAN, CRK ;

SALVINO, RE ;

ANCONA, MA ;

PERKINS, FK ;

TURNER, NH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06) :2733-2740

[5]

Early K., 1990, Microelectronic Engineering, V11, P317, DOI 10.1016/0167-9317(90)90122-A

[6] DEVELOPER CHARACTERISTICS OF POLY-(METHYL METHACRYLATE) ELECTRON RESIST [J].

GREENEICH, JS .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (07) :970-976

[7] SIMULTANEOUS-OPTIMIZATION OF SPECTRUM, SPATIAL COHERENCE, GAP, FEATURE BIAS, AND ABSORBER THICKNESS IN SYNCHROTRON-BASED X-RAY-LITHOGRAPHY [J].

HECTOR, SD ;

SMITH, HI ;

SCHATTENBURG, ML .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06) :2981-2985

[8]

Henke B. L., 1982, Atomic Data and Nuclear Data Tables, V27, P1, DOI 10.1016/0092-640X(82)90002-X

[9] UPDATED SYSTEM MODEL FOR X-RAY-LITHOGRAPHY [J].

KHAN, M ;

MOHAMMAD, L ;

XIAO, J ;

OCOLA, L ;

CERRINA, F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06) :3930-3935

[10] PARAMETRIC MODELING OF PHOTOELECTRON EFFECTS IN X-RAY-LITHOGRAPHY [J].

OCOLA, LE ;

CERRINA, F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06) :2839-2844

← 1 2 →