GAS-PHASE REACTIONS IN PLASMAS OF SF6 WITH O-2 IN HE

被引：66

作者：

RYAN, KR

PLUMB, IC

机构：

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1988年 / 8卷 / 03期

关键词：

D O I：

10.1007/BF01020406

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：263 / 280

页数：18

共 26 条

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