A TIME-OF-FLIGHT DETECTOR FOR HEAVY-ION RBS

被引:7
作者
DOBELI, M
HAUBERT, PC
LIVI, RP
SPICKLEMIRE, SJ
WEATHERS, DL
TOMBRELLO, TA
机构
[1] SWISS FED INST TECHNOL,PAUL SCHERRER INST,CH-8092 ZURICH,SWITZERLAND
[2] UNIV FED RIO GRANDE SUL,INST FIS,BR-90000 PORTO ALEGRE,RS,BRAZIL
[3] UNIV N TEXAS,DENTON,TX
基金
美国国家科学基金会;
关键词
D O I
10.1016/0168-583X(91)95022-6
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We describe the details and performance of a time-of-flight (TOF) spectrometer for application in heavy ion RBS. An energy resolution of better than 1% is achieved for O-16 and Cl-35 ions in the energy range between 3 and 15 MeV. Using ions with a mass up to 45 amu as projectiles a mass resolution between 1 and 2 amu is obtained over the whole periodic table. At the sample surface a depth resolution of approximately 1-mu-g/cm2 can be achieved. The technique has been used to measure indium profiles in InGaAs/GaAs quantum well samples with a depth resolution of 2 nm, and to determine the arsenic loss in annealed GaAs samples. Further applications and improvements of the spectrometer will be discussed.
引用
收藏
页码:764 / 767
页数:4
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