ELECTROLYTIC HYDROGENATION OF SILICON

被引：40

作者：

LEWERENZ, HJ

BITZER, T

机构：

[1] Hahn-Meitner-Institut, Bereich Photochemische Energieumwandlung

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1992年 / 139卷 / 02期

关键词：

D O I：

10.1149/1.2069274

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The surface of n-Si (111) subjected to specific electrochemical treatment is analyzed using a combined electrochemistry-ultra high vacuum surface analysis system. Contamination levels after conditioning in amonium fluoride solution could be kept below 0.2 monolayers (ML) of carbon, allowing the first surface analysis measurements with ultraviolet photoelectron spectroscopy (UPS). UP-spectra show a hydrogen terminated Si (111) H (1 x 1) surface and Si-Si:H3 species. In accordance with a hexagonal LEED pattern we conclude that the surface is completely terminated by hydrogen.

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页码：L21 / L23

页数：3

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