WAVELENGTH DEPENDENCE OF GAIN FROM 248.2 TO 248.4 NM IN A KRF DISCHARGE LASER

The small signal gain and saturation intensity of a KrF discharge laser module have been measured in the peak gain region of 248. 22 to 248. 40 nm. The gain has also been measured for the frequency-doubled argon-ion laser line at 248. 25 nm and found to be equal to the peak KrF gain of 0. 143 plus or minus 0. 002 cm** minus **1 to within the experimental accuracy. The best-fit saturation intensity for this wavelength region was found to be 2. 3 plus or minus 0. 3 MW cm** minus **2.