LASER-INDUCED DIODE LINKING FOR WAFER-SCALE INTEGRATION

被引：22

作者：

COHEN, SS

WYATT, PW

CHAPMAN, GH

CANTER, JM

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 09期

关键词：

D O I：

10.1109/16.2588

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1533 / 1550

页数：18

共 51 条

[1]

ABAKUMOV VN, 1986, SOV PHYS SEMICOND+, V20, P1363

[2] SOME CALCULATIONS OF TEMPERATURE PROFILES IN THIN-FILMS WITH LASER-HEATING [J].

ABRAHAM, E ;

HALLEY, JM .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 42 (04) :279-285

[3] TRANSIENT NONLINEAR LASER-HEATING AND DEPOSITION - A COMPARISON OF THEORY AND EXPERIMENT [J].

ALLEN, SD ;

GOLDSTONE, JA ;

STONE, JP ;

JAN, RY .

JOURNAL OF APPLIED PHYSICS, 1986, 59 (05) :1653-1657

[4] ANISOTROPIC MELTING AND EPITAXIAL REGROWTH OF LASER-IRRADIATED SILICON [J].

ALLMEN, MV ;

LUTHY, W ;

AFFOLTER, K .

APPLIED PHYSICS LETTERS, 1978, 33 (09) :824-826

[5]

ANTONENKO AK, 1976, SOV PHYS SEMICOND+, V10, P81

[6] Vapour pressure measurements of high boiling point metals [J].

Baur, E ;

Brunner, R .

HELVETICA CHIMICA ACTA, 1934, 17 :958-969

[7]

Born M, 1959, PRINCIPLES OPTICS

[8] TEMPERATURE DISTRIBUTIONS PRODUCED IN A 2-LAYER STRUCTURE BY A SCANNING CW LASER OR ELECTRON-BEAM [J].

BURGENER, ML ;

REEDY, RE .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :4357-4363

[9] MODELING OF CW LASER ANNEALING OF MULTILAYER STRUCTURES [J].

CALDER, ID ;

SUE, R .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) :7545-7550

[10]

CARSLAW HS, 1959, CONDUCTION HEAT SOLI

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