THERMAL-STABILITY OF THE CU/PTSI METALLURGY

被引：27

作者：

CHANG, CA

机构：

来源：

关键词：

D O I：

10.1063/1.344182

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2989 / 2992

页数：4

共 9 条

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[8]

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