A NEW ETCHANT SYSTEM, K2CR2O7-H2SO4-HCL,FOR GAAS AND INP

被引：21

作者：

ADACHI, S

KAWAGUCHI, H

IWANE, G

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1981年 / 16卷 / 09期

关键词：

D O I：

10.1007/BF01113581

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：2449 / 2456

页数：8

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