MINORITY-CARRIER GENERATION STUDIES IN MOS CAPACITORS ON N-TYPE SILICON

被引:41
作者
YOUNG, DR [1 ]
OSBURN, CM [1 ]
机构
[1] IBM CORP, THOMAS J WATSON RES CTR, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1149/1.2403307
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:1578 / 1581
页数:4
相关论文
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