PHYSICS OF METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION

被引:4
作者
RICHTER, W
机构
来源
FESTKORPERPROBLEME-ADVANCES IN SOLID STATE PHYICS | 1986年 / 26卷
关键词
D O I
10.1007/BFb0107803
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
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页码:335 / 359
页数:25
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