DEVELOPMENT OF SCANNING MU-RHEED MICROSCOPY FOR IMAGING POLYCRYSTAL GRAIN-STRUCTURE IN LSI

被引：6

作者：

TSUBOUCHI, K

MASU, K

TANAKA, M

HIURA, Y

OHMI, T

MIKOSHIBA, N

HAYASHI, S

MARUI, T

TERAMOTO, A

KAJIKAWA, T

SOEJIMA, H

机构：

[1] SHIMADZU CO LTD, KYOTO 604, JAPAN

[2] TOHOKU UNIV, FAC ENGN, DEPT ELECTR, SENDAI, MIYAGI 980, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 11期

关键词：

D O I：

10.1143/JJAP.28.2075

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L2075 / L2077

页数：3

共 4 条

[1] SYSTEM FOR REFLECTION ELECTRON-MICROSCOPY AND ELECTRON-DIFFRACTION AT INTERMEDIATE ENERGIES [J].

COWLEY, JM ;

ALBAIN, JL ;

HEMBREE, GG ;

HOJLUNDNIELSEN, PE ;

KOCH, FA ;

LANDRY, JD ;

SHUMAN, H .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1975, 46 (07) :826-829

[2] MICRO-PROBE REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION TECHNIQUE .1. DETERMINATION OF CRYSTALLOGRAPHIC ORIENTATIONS OF POLYCRYSTAL-SILICON SURFACES [J].

ICHIKAWA, M ;

HAYAKAWA, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1982, 21 (01) :145-153

[3]

SAITO T, 1989, 21ST C SOL STAT DEV, P25

[4] ELECTRON BACKSCATTERING PATTERNS - NEW TECHNIQUE FOR OBTAINING CRYSTALLOGRAPHIC INFORMATION IN SCANNING ELECTRON-MICROSCOPE [J].

VENABLES, JA ;

HARLAND, CJ .

PHILOSOPHICAL MAGAZINE, 1973, 27 (05) :1193-1200

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