DEPOSITION OF ALPHA-SI-H BY HOMOGENEOUS CVD

被引：14

作者：

SCOTT, BA

PLECENIK, RM

SIMONYI, EE

机构：

来源：

JOURNAL DE PHYSIQUE | 1981年 / 42卷 / NC4期

关键词：

D O I：

10.1051/jphyscol:19814139

中图分类号：

学科分类号：

摘要：

引用

页码：635 / 638

页数：4

共 18 条

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