NANO-CALIBRATION FOR STYLUS-BASED SURFACE MEASUREMENT

被引：4

作者：

WHITEHOUSE, DJ

BOWEN, DK

CHETWYND, DG

DAVIES, ST

机构：

[1] Univ of Warwick, Conventry, Engl, Univ of Warwick, Conventry, Engl

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1988年 / 21卷 / 01期

关键词：

D O I：

10.1088/0022-3735/21/1/005

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：46 / 51

页数：6

共 14 条

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BOWEN, DK .

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