INSITU DEVELOPMENT OF ION BOMBARDED POLY(METHYLMETHACRYLATE) RESIST IN A REACTIVE GAS AMBIENT

被引：8

作者：

GAMO, K

HAMAUZU, H

XU, Z

NAMBA, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.584294

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：989 / 992

页数：4

共 13 条

[1]

Fujiwara S., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V773, P195, DOI 10.1117/12.940371

[2]

Gamo K., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V632, P52, DOI 10.1117/12.963668

[3]

GAMO K, 1984, 16TH INT C SOL STAT, P31

[4] NITROCELLULOSE AS A POSITIVE OR NEGATIVE SELF-DEVELOPING RESIST [J].

GEIS, MW ;

RANDALL, JN ;

MOUNTAIN, RW ;

WOODHOUSE, JD ;

BROMLEY, EI ;

ASTOLFI, DK ;

ECONOMOU, NP .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :343-346

[5] DIRECT ENGRAVING ON POSITIVE RESISTS BY SYNCHROTRON RADIATION [J].

ICHIMURA, S ;

HIRATA, M ;

TANINO, H ;

ATODA, N ;

ONO, M ;

HOH, K .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (04) :1076-1079

[6] DEEP UV SUB-MICRON LITHOGRAPHY BY USING A PULSED HIGH-POWER EXCIMER LASER [J].

KAWAMURA, Y ;

TOYODA, K ;

NAMBA, S .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) :6489-6490

[7] ION-BEAM EXPOSURE OF RESIST MATERIALS [J].

KOMURO, M ;

ATODA, N ;

KAWAKATSU, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (03) :483-490

[8] DIRECT WRITING OF GRATINGS BY ELECTRON-BEAM IN POLY(METHYL METHACRYLATE) OPTICAL-WAVEGUIDES [J].

KOTANI, H ;

KAWABE, M ;

NAMBA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1979, 18 (02) :279-283

[9] RADIOLYSIS AND RESOLUTION LIMITS OF INORGANIC HALIDE RESISTS [J].

MURAY, A ;

SCHEINFEIN, M ;

ISAACSON, M ;

ADESIDA, I .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :367-372

[10] PRESSURE AND IRRADIATION ANGLE DEPENDENCE OF MASKLESS ION-BEAM ASSISTED ETCHING OF GAAS AND SI [J].

OCHIAI, Y ;

GAMO, K ;

NAMBA, S .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :67-70

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