EFFECT OF OXYGEN ON ELECTRICAL AND STURCTURAL PROPERTIES OF TRIODE-SPUTTERED TANTALUM FILMS

被引：21

作者：

WATERHOU.N

WILCOX, PS

WILLMOTT, DJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 13期

关键词：

D O I：

10.1063/1.1659995

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5649 / &

共 20 条

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[10]

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