FABRICATION OF INTEGRATED INJECTION LOGIC WITH ELECTRON-BEAM LITHOGRAPHY AND ION-IMPLANTATION

被引：23

作者：

EVANS, SA

BARTELT, JL

SLOAN, BJ

VARNELL, GL

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1978年 / 25卷 / 04期

关键词：

D O I：

10.1109/T-ED.1978.19098

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：402 / 407

页数：6

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