DESIGN OF AN ELEGANT AND INEXPENSIVE MULTIPLE-TARGET HOLDER AND LASER-BEAM SCANNER FOR USE IN LASER-ABLATION DEPOSITION OF THIN-FILMS

In thin film deposition by laser ablation it is often important to rotate the target and to raster the laser beam across the target during ablation to prevent excessive surface damage. A simple multiple-target holder, which allows individual target rotation and in vacuo target interchange, is presented. We also describe a method of rastering the laser beam.