INSITU FTIR AND SURFACE-ANALYSIS OF THE REACTION OF TRIMETHYLGALLIUM AND AMMONIA

被引：47

作者：

MAZZARESE, D ^{[1
]}

TRIPATHI, A ^{[1
]}

CONNER, WC ^{[1
]}

JONES, KA ^{[1
]}

CALDERON, L ^{[1
]}

ECKART, DW ^{[1
]}

机构：

[1] ELECTR TECHNOL & DEVICE LAB,FT MONMOUTH,NJ 07703

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1989年 / 18卷 / 03期

关键词：

D O I：

10.1007/BF02657985

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：369 / 377

页数：9

共 30 条

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[8] HOMOGENEOUS AND HETEROGENEOUS THERMAL-DECOMPOSITION RATES OF TRIMETHYLGALLIUM AND ARSINE AND THEIR RELEVANCE TO THE GROWTH OF GAAS BY MOCVD
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[9] SPECTRA AND STRUCTURE OF GALLIUM COMPOUNDS .5. INFRARED AND RAMAN-SPECTRA OF GASEOUS, LIQUID AND SOLID TRIMETHYLGALLIUM
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[J]. JOURNAL OF RAMAN SPECTROSCOPY, 1981, 11 (03) : 168 - 173
[10] SPECTRA AND STRUCTURE OF GALLIUM COMPOUNDS .4. VIBRATIONAL STUDIES OF AMMONIA TRIMETHYLGALLANE AND AMMONIA-D3 TRIMETHYLGALLANE
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[J]. INORGANIC CHEMISTRY, 1982, 21 (04) : 1466 - 1471

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