APPLICATION OF THIN-FILM INDUCTORS TO LC FILTERS

被引：6

作者：

YAMAGUCHI, M

ISHIHARA, K

ARAI, KI

机构：

[1] Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira, Aoba-Ku

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1993年 / 29卷 / 06期

关键词：

D O I：

10.1109/20.281143

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper discusses the application of thin-film inductors to thin-film based LC filters. The trial monolithic thin-film LC filter consists of thin-film inductors and thin-film capacitors, fabricated by the RF sputtering and ion-milling techniques. This filter is a second-order low-pass filter with a cut-off frequency of 50 MHz. We fabricated two kinds of filters using a non magnetic thin-film inductor or a magnetic thin-film inductor, and proved that magnetic thin-film permits to the reduction of the size and the insertion loss of the filter.

引用

页码：3222 / 3224

页数：3

共 13 条

[1] AN IMPROVED TECHNIQUE OF IMPEDANCE MEASUREMENT FOR THIN-FILM INDUCTORS OVER 10MHZ [J].