DIAGNOSTICS OF GAS REACTION USING TRIMETHYLGALLIUM-ASH3 AND TRIETHYLGALLIUM-ASH3 IN LOW-PRESSURE ORGANOMETALLIC VAPOR-PHASE EPITAXY

被引：13

作者：

HORIGUCHI, S ^{[1
]}

KIMURA, K ^{[1
]}

TAKAGISHI, S ^{[1
]}

KAMON, K ^{[1
]}

MASHITA, M ^{[1
]}

MIHARA, M ^{[1
]}

ISHII, M ^{[1
]}

机构：

[1] OPTOELECTR JOINT RES LAB,NAKAHARA KU,KAWASAKI 211,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 12期

关键词：

D O I：

10.1143/JJAP.26.2002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2002 / 2008

页数：7

共 22 条

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