QUANTITATIVE SURFACE-ANALYSIS OF LAYERED MATERIALS

被引：37

作者：

HOLLOWAY, PH

BUSSING, TD

机构：

[1] Department of Materials Science & Engineering, University of Florida, Gainesville, Florida

来源：

SURFACE AND INTERFACE ANALYSIS | 1992年 / 18卷 / 04期

关键词：

D O I：

10.1002/sia.740180402

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The effects of concentration variation with depth, C(X), on the quantitative reduction of electron spectroscopic data is discussed. It is shown that when the concentration varies with depth, quantitation of the data is affected by the escape depth of the electron transitions chosen for quantitation. Therefore, accurate quantitation is impossible without knowledge of C(X). A Laplace transform method to determine C(X) from angle-resolved electron spectroscopic data is reviewed, along with potential problems caused by variation with angle of the escape depth of electrons in the solid, channeling, forward scattering, matrix corrections and surface roughness.

引用

页码：251 / 256

页数：6