DEPOSITION OF CARBONACEOUS FILMS USING ECR PLASMA APPARATUS DEPOSITION OF COLORLESS, TRANSPARENT AND SEMICONDUCTING FILM FROM METHANE PLASMA

被引：12

作者：

FUJITA, T

MATSUMOTO, O

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 09期

关键词：

D O I：

10.1149/1.2097523

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2624 / 2629

页数：6

共 24 条

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