SPATIAL-RESOLUTION OF SEM-EBIC IMAGES

被引：7

作者：

DONOLATO, C

机构：

[1] Max-Planck-Institut für Festkörperforschung

来源：

SOLID-STATE ELECTRONICS | 1979年 / 22卷 / 09期

关键词：

D O I：

10.1016/0038-1101(79)90129-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Experiments indicate that the spatial resolution of SEM-EBIC images of semiconductor defects is not limited by the minority carrier diffusion length L. It is shown that this property can be explained by a three-dimensional analysis of the diffusion of beam generated minority carriers in a semiconductor having L → ∞. For a small localized defect, the resolution is expected to be limited by the defect depth or the extension of the generation region, whichever is the greatest. © 1999.

引用

页码：797 / 799

页数：3

共 13 条

[1] OBSERVATIONS OF DISLOCATIONS AND JUNCTION IRREGULARITIES IN BIPOLAR-TRANSISTORS USING THE EBIC MODE OF THE SCANNING ELECTRON-MICROSCOPE
ASHBURN, P
BULL, CJ
[J]. SOLID-STATE ELECTRONICS, 1979, 22 (01) : 105 - 110
[2] THEORY OF LIFE TIME MEASUREMENTS WITH SCANNING ELECTRON-MICROSCOPE - STEADY-STATE
BERZ, F
KUIKEN, HK
[J]. SOLID-STATE ELECTRONICS, 1976, 19 (06) : 437 - 445
[3] SCANNING ELECTRON-MICROSCOPE EBIC AND CL MICROGRAPHS OF DISLOCATIONS IN GAP
DARBY, DB
BOOKER, GR
[J]. JOURNAL OF MATERIALS SCIENCE, 1977, 12 (09) : 1827 - 1833
[4] DAVIDSON SM, 1977, J MICROSC-OXFORD, V110, P177, DOI 10.1111/j.1365-2818.1977.tb00032.x
[5] DONOLATO C, 1978, OPTIK, V52, P19
[6] CONTRAST AND RESOLUTION OF SEM CHARGE-COLLECTION IMAGES OF DISLOCATIONS
DONOLATO, C
[J]. APPLIED PHYSICS LETTERS, 1979, 34 (01) : 80 - 81
[7] GONZALES AJ, 1974, SCANNING ELECTRON MI, P942
[8] OBSERVATION OF DISLOCATIONS IN A SILICON PHOTOTRANSISTOR BY SCANNING ELECTRON-MICROSCOPY USING BARRIER ELECTRON VOLTAIC EFFECT
HOLT, DB
OGDEN, R
[J]. SOLID-STATE ELECTRONICS, 1976, 19 (01) : 37 - &
[9] SEM OBSERVATION OF DISLOCATIONS IN BORON IMPLANTED SILICON USING SCHOTTKY-BARRIER EBIC TECHNIQUE
IOANNOU, DE
DAVIDSON, SM
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 48 (01): : K1 - &
[10] Leamy H. J., 1976, Scanning Electron Microscopy 1976. I, P529

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