ANNEALING BEHAVIOR OF (7X7) DOMAIN BOUNDARIES ON SI(111) OBSERVED BY SECONDARY-ELECTRON IMAGING

被引:11
作者
AIZAWA, N
HOMMA, Y
机构
[1] NIPPON TELEGRAPH & TEL PUBL CORP, INTERDISCIPLINARY RES LABS, MUSASHINO, TOKYO 180, JAPAN
[2] TOKYO GAKUGEI UNIV, KOGANEI, TOKYO 184, JAPAN
关键词
LOW INDEX SINGLE CRYSTAL SURFACES; SCANNING ELECTRON MICROSCOPY (SEM); SECONDARY ELECTRON EMISSION; SILICON; SURFACE STRUCTURE;
D O I
10.1016/0039-6028(95)00687-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The rearrangement of (7 X 7) domain boundaries on Si(111) surfaces during annealing has been investigated by using a secondary electron imaging technique: scanning electron surface microscopy. The shape of the domain boundaries changes during annealing for several minutes at 8 degrees C below the (7 X 7)-(1 X 1) transition temperature in order to form stabilized domain structures. The stabilized boundaries are in the [110] directions, reflecting the structures of the (7 X 7) unit. This is the result of minimizing the energy of the boundaries, which consisted of (1 x 1) structures fluctuating with the size of the (7 X 7) units at the temperature.
引用
收藏
页码:101 / 108
页数:8
相关论文
共 15 条
[1]   PRESERVATION OF THE PHASE-BOUNDARY OF SI(111) 7X7 STRUCTURE IN AIR STUDIED BY FORCE MICROSCOPY [J].
FUKUDA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1994, 33 (6A) :L797-L799
[2]   SECONDARY-ELECTRON IMAGING OF MONOLAYER STEPS ON A CLEAN SI(111) SURFACE [J].
HOMMA, Y ;
TOMITA, M ;
HAYASHI, T .
SURFACE SCIENCE, 1991, 258 (1-3) :147-152
[3]   ATOMIC CONFIGURATION DEPENDENT SECONDARY-ELECTRON EMISSION FROM RECONSTRUCTED SILICON SURFACES [J].
HOMMA, Y ;
SUZUKI, M ;
TOMITA, M .
APPLIED PHYSICS LETTERS, 1993, 62 (25) :3276-3278
[4]   DC-RESISTIVE-HEATING-INDUCED STEP BUNCHING ON VICINAL SI (111) [J].
HOMMA, Y ;
MCCLELLAND, RJ ;
HIBINO, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1990, 29 (12) :L2254-L2256
[5]   SOME NEW TECHNIQUES IN REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION (RHEED) APPLICATION TO SURFACE-STRUCTURE STUDIES [J].
INO, S .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (06) :891-908
[6]   CLASSIFICATION AND STRUCTURE ANALYSES OF DOMAIN BOUNDARIES ON SI(111) [J].
ITOH, M ;
TANAKA, H ;
WATANABE, Y ;
UDAGAWA, M ;
SUMITA, I .
PHYSICAL REVIEW B, 1993, 47 (04) :2216-2227
[7]   CHEMISORPTION AND ORDERED SURFACE STRUCTURES [J].
LANDER, JJ .
SURFACE SCIENCE, 1964, 1 (02) :125-164
[8]   TRANSFORMATIONS ON CLEAN SI(111) STEPPED SURFACE DURING SUBLIMATION [J].
LATYSHEV, AV ;
ASEEV, AL ;
KRASILNIKOV, AB ;
STENIN, SI .
SURFACE SCIENCE, 1989, 213 (01) :157-169
[9]   REAL-TIME OBSERVATION OF THE SI(111) - (7 X 7)-(1 X-1) PHASE-TRANSITION BY SCANNING TUNNELING MICROSCOPY [J].
MIKI, K ;
MORITA, Y ;
TOKUMOTO, H ;
SATO, T ;
IWATSUKI, M ;
SUZUKI, M ;
FUKUDA, T .
ULTRAMICROSCOPY, 1992, 42 :851-857
[10]   DIRECT OBSERVATION OF THE PHASE-TRANSITION BETWEEN THE (7X7) AND (1X1) STRUCTURES OF CLEAN (111) SILICON SURFACES [J].
OSAKABE, N ;
TANISHIRO, Y ;
YAGI, K ;
HONJO, G .
SURFACE SCIENCE, 1981, 109 (02) :353-366