THE SELECTIVELY GROWN PERMEABLE JUNCTION BASE TRANSISTOR WITH A GATE OF HIGHLY CARBON-DOPED GAAS

被引:5
作者
MORSCH, G
GRABER, J
KAMP, M
HOLLFELDER, M
LUTH, H
机构
[1] Institut für Schicht- und Ionentechnik (ISI), Forschungszentrum Jülich
关键词
D O I
10.1016/0022-0248(94)90420-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The homoepitaxial permeable junction base transistor (PJBT) is a new device concept that exploits two main advantages of metalorganic molecular beam epitaxy (MOMBE): the possibility of high p-type doping and selective growth. The device structure is described and the demands on epitaxial growth are investigated. Excellent selective growth of the channels is achieved if the strong dependence of the morphology of the channels on their orientation with respect to the surface is taken into account. The observed difference of the DC characteristics for two contact configurations can be explained by the velocity overshoot. Finally, the high frequency performance of a non-optimized device is presented.
引用
收藏
页码:256 / 260
页数:5
相关论文
共 15 条
[1]   CARBON DOPING OF III-V-COMPOUNDS GROWN BY MOMBE [J].
ABERNATHY, CR ;
PEARTON, SJ ;
REN, F ;
HOBSON, WS ;
FULLOWAN, TR ;
KATZ, A ;
JORDAN, AS ;
KOVALCHICK, J .
JOURNAL OF CRYSTAL GROWTH, 1990, 105 (1-4) :375-382
[2]   CBE SELECTIVE EMBEDDED GROWTH FOR QUASI-PLANAR GAAS HBT APPLICATION [J].
ALEXANDRE, F ;
ZERGUINE, D ;
LAUNAY, P ;
BENCHIMOL, JL ;
ETRILLARD, J .
JOURNAL OF CRYSTAL GROWTH, 1993, 127 (1-4) :221-225
[3]   CURRENT STATUS OF SELECTIVE AREA EPITAXY BY OMCVD [J].
BHAT, R .
JOURNAL OF CRYSTAL GROWTH, 1992, 120 (1-4) :362-368
[4]   REACTIVE ION ETCHING OF GAAS USING A MIXTURE OF METHANE AND HYDROGEN [J].
CHEUNG, R ;
THOMS, S ;
BEAMONT, SP ;
DOUGHTY, G ;
LAW, V ;
WILKINSON, CDW .
ELECTRONICS LETTERS, 1987, 23 (16) :857-859
[5]   THE PERMEABLE JUNCTION BASE TRANSISTOR WITH A NEW GATE OF EXTREMELY HIGH DOPED P++-GAAS [J].
GRABER, J ;
KAMP, M ;
MORSCH, G ;
MEYER, R ;
HARDTDEGEN, H ;
LUTH, H .
MICROELECTRONIC ENGINEERING, 1992, 19 (1-4) :131-134
[6]  
GRABER J, 1993, 20TH INT S GAAS REL
[7]   SELECTIVE GROWTH OF GAAS IN THE MOMBE AND MOCVD SYSTEMS [J].
HEINECKE, H ;
BRAUERS, A ;
GRAFAHREND, F ;
PLASS, C ;
PUTZ, N ;
WERNER, K ;
WEYERS, M ;
LUTH, H ;
BALK, P .
JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) :303-309
[8]  
Hollis M. A., 1987, Proceedings of the SPIE - The International Society for Optical Engineering, V797, P335, DOI 10.1117/12.941060
[9]  
JONES SH, 1990, J CRYST GROWTH, V108, P73
[10]   METALLIC P-TYPE GAAS AND GAALAS GROWN BY METALORGANIC MOLECULAR-BEAM EPITAXY [J].
KONAGAI, M ;
YAMADA, T ;
AKATSUKA, T ;
SAITO, K ;
TOKUMITSU, E ;
TAKAHASHI, K .
JOURNAL OF CRYSTAL GROWTH, 1989, 98 (1-2) :167-173