THEORETICAL AND EXPERIMENTAL STUDY OF IONIZATION PROCESSES DURING LOW-ENERGY ION SPUTTERING

被引:119
作者
SROUBEK, Z [1 ]
机构
[1] CZECHOSLOVAK ACAD SCI, INST RADIO ENGN & ELECTR, PRAGUE, CZECHOSLOVAKIA
关键词
D O I
10.1016/0039-6028(74)90092-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:47 / 59
页数:13
相关论文
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