INTERNAL REFLECTION ELLIPSOMETRY FOR METAL DEPOSITS

被引：8

作者：

CHAN, EC

MARTON, JP

机构：

来源：

关键词：

D O I：

10.1063/1.1660869

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4027 / &

共 11 条

[1]

HEAVEN OS, 1965, OPTICAL PROPERTIES T, P185

[2]

HEAVEN OS, 1965, OPTICAL PROPERTIES T, P165

[3]

HEAVENS OS, 1965, OPT PROPERTIES THIN, P193

[4]

LUKES F, 1969, SURFACE SCI, V16, P122

[5] ELLIPSOMETRIC STUDY OF NI-P FILM SURFACES [J].

MARTON, JP ;

CHAN, EC .

[6]

MCCRACKIN FC, 1964, NBS242 TECH NOT

MCCRACKIN, FL ;

PASSAGLIA, E ;

STROMBERG, RR ;

STEINBERG, HL .

JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+

[8] OPTICAL PROPERTIES OF NIO AND COO [J].

POWELL, RJ ;

SPICER, WE .

PHYSICAL REVIEW B-SOLID STATE, 1970, 2 (06) :2182-+

SHEWCHUN, J ;

ROWE, EC .

[10]

Smith N. V., 1969, Physical Review, V183, P634, DOI 10.1103/PhysRev.183.634