A method for the accurate comparison of lattice parameters

被引:11
作者
Bowen, DK [1 ]
Tanner, BK [1 ]
机构
[1] BEDE SCI INSTRUMENTS LTD,DURHAM DH6 5PF,ENGLAND
关键词
D O I
10.1107/S0021889895006297
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A new method of comparison of lattice parameters is described. The method uses a standard double-crystal diffractometer, fitted with a specimen rotation stage, which compensates for tilt errors on the specimen setting. Some improvement is possible through the use of a monochromatizing system with a well defined wavelength. The use of a single reference standard enables the instrument zero to be accurately determined; the use of a second reference or a different reflection from the first allows the wavelength to be accurately determined. The errors are carefully assessed and it is shown that some errors important in other methods are self-cancelling through the use of the rotation stage, which need not itself be an ultraprecision component. Peak location to a confidence level of 10 '' permits absolute traceable lattice-parameter determination to a few tens of parts in 10(6), with much greater relative sensitivity. The method is verified using both a tangent-arm-driven and direct-drive double-axis diffractometer at room temperature on samples of semi-insulating gallium arsenide. Comparison of the lattice parameter of a sample using this method and the conventional Bond technique is satisfactory.
引用
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页码:753 / 760
页数:8
相关论文
共 13 条
[1]  
ANDERSEN AD, 1995, COMMUNICATION
[2]   THE LATTICE-PARAMETER OF HIGHLY PURE SILICON SINGLE-CRYSTALS [J].
BECKER, P ;
SEYFRIED, P ;
SIEGERT, H .
ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1982, 48 (01) :17-21
[3]   ABSOLUTE MEASUREMENT OF THE (220)-LATTICE PLANE SPACING IN A SILICON CRYSTAL [J].
BECKER, P ;
DORENWENDT, K ;
EBELING, G ;
LAUER, R ;
LUCAS, W ;
PROBST, R ;
RADEMACHER, HJ ;
REIM, G ;
SEYFRIED, P ;
SIEGERT, H .
PHYSICAL REVIEW LETTERS, 1981, 46 (23) :1540-1543
[4]  
BOWEN DK, 1991, MATER RES SOC SYMP P, V208, P113
[5]   SUB-NANOMETER DISPLACEMENTS CALIBRATION USING X-RAY INTERFEROMETRY [J].
BOWEN, DK ;
CHETWYND, DG ;
SCHWARZENBERGER, DR .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1990, 1 (02) :107-119
[6]  
BOWEN DK, 1994, ADV X RAY ANAL, V37, P123
[7]   BRAGG ANGLE MEASUREMENT AND MAPPING [J].
HART, M .
JOURNAL OF CRYSTAL GROWTH, 1981, 55 (02) :409-427
[8]   A FAST HIGH-ACCURACY LATTICE-PARAMETER COMPARATOR [J].
HAUSERMANN, D ;
HART, M .
JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1990, 23 :63-69
[9]  
LOXLEY N, 1991, MATER RES SOC SYMP P, V208, P107
[10]  
TANNER BK, 1986, MATER RES SOC S P, V69, P191