REACTIVE SPUTTERING OF PTFE FILMS IN ARGON-CF4 MIXTURES

被引：33

作者：

LEHMANN, HW ^{[1
]}

FRICK, K ^{[1
]}

WIDMER, R ^{[1
]}

VOSSEN, JL ^{[1
]}

JAMES, E ^{[1
]}

机构：

[1] RCA,PRINCETON,NJ 08540

来源：

THIN SOLID FILMS | 1978年 / 52卷 / 02期

关键词：

D O I：

10.1016/0040-6090(78)90141-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：231 / 235

页数：5

相关论文

共 15 条

[1] PROPERTIES OF FLUOROCARBON FILMS PREPARED BY RF SPUTTERING AND PLASMA POLYMERIZATION IN INERT AND ACTIVE GAS
BIEDERMAN, H
OJHA, SM
HOLLAND, L
[J]. THIN SOLID FILMS, 1977, 41 (03) : 329 - 339
[2] BUDINSKI KG, 1975, J VAC SCI TECHNOL, V12, P788
[3] COBURN JW, 7TH P INT VAC C
[4] COBURN JW, 1977, 3RD INT C SOL SURF V, P1257
[5] EFFECT OF SECONDARY ELECTRONS AND NEGATIVE-IONS ON SPUTTERING OF FILMS
HANAK, JJ
PELLICANE, JP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 406 - 409
[6] FRICTION OF SPUTTERED PTFE FILMS
HARROP, R
HARROP, PJ
[J]. THIN SOLID FILMS, 1969, 3 (02) : 109 - &
[7] COMBINATION MOISTURE RESISTANT AND ANTIREFLECTION PLASMA POLYMERIZED THIN-FILMS FOR OPTICAL COATINGS
HOLLAHAN, JR
WYDEVEN, T
JOHNSON, CC
[J]. APPLIED OPTICS, 1974, 13 (08): : 1844 - 1852
[8] SPUTTERED AND PLASMA POLYMERIZED FLUOROCARBON FILMS
HOLLAND, L
BIEDERMAN, H
OJHA, SM
[J]. THIN SOLID FILMS, 1976, 35 (02) : L19 - L21
[9] MOISTURE RESISTANT OPTICAL FILMS - THEIR PRODUCTION AND CHARACTERIZATION
HOPKINS, RH
HOFFMAN, RA
KRAMER, WE
[J]. APPLIED OPTICS, 1975, 14 (11): : 2631 - 2638
[10] THERMAL DEGRADATION OF POLYETHYLENE AND POLYTETRAFLUOROETHYLENE DURING VACUUM EVAPORATION
LUFF, PP
WHITE, M
[J]. VACUUM, 1968, 18 (08) : 437 - &