HIGH-QUALITY (111)B GAAS, ALGAAS, ALGAAS/GAAS MODULATION DOPED HETEROSTRUCTURES AND A GAAS/INGAAS/GAAS QUANTUM-WELL

被引:52
作者
CHIN, A
MARTIN, P
HO, P
BALLINGALL, J
YU, TH
MAZUROWSKI, J
机构
关键词
D O I
10.1063/1.106182
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the successful growth of high quality molecular beam epitaxy (MBE) GaAs, AlGaAs, AlGaAs/GaAs modulation doped heterostructures and a GaAs/InGaAs/GaAs quantum well on GaAs (111)B substrates. Modulation doped heterostructures show a 77 K mobility of 145 500 cm2/V s with a sheet density of 5.0 x 10(11) cm-2. Photoluminescence of (111)B GaAs indicates a lower carbon incorporation than achieved on (100) substrates. The low growth temperature and high material quality obtainable in (111)B growth will provide advantages for laser diodes and heterostructure field effect transistors.
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页码:1899 / 1901
页数:3
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