CUINSE2 THIN-FILMS PRODUCED BY RF-SPUTTERING IN AR/H2 ATMOSPHERES

被引：33

作者：

MARTIL, I

SANTAMARIA, J

IBORRA, E

GONZALEZDIAZ, G

SANCHEZQUESADA, F

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 10期

关键词：

D O I：

10.1063/1.339135

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4163 / 4169

页数：7

共 26 条

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