USE OF SILANE SILICON DIOXIDE FILMS TO CONTOUR OXIDE EDGES

被引：20

作者：

HALL, LH

CROSTHWAIT, DL

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(72)90132-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：447 / +

页数：1

共 15 条

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