RECOMBINATION ACTIVITY OF CLEAN AND CONTAMINATED MISFIT DISLOCATIONS IN SI(GE) STRUCTURES

被引:20
作者
KITTLER, M [1 ]
ULHAQBOUILLET, C [1 ]
HIGGS, V [1 ]
机构
[1] UNIV LONDON KINGS COLL,LONDON WC2R 2LS,ENGLAND
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1994年 / 24卷 / 1-3期
关键词
D O I
10.1016/0921-5107(94)90296-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The recombination at misfit dislocations in Si(Ge) structures was studied by the technique of electron-beam-induced current. The contrast temperature dependence was interpreted using the Schokley-Read-Hall recombination theory. Different situations were observed: either a dominance of shallow centres (intrinsic property) or of midgap levels (contamination), or a combination of both. D-band luminescence studies support the role of contamination. The very small recombination at dislocations in as-grown material was interpreted as a passivation of the intrinsic activity.
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页码:52 / 55
页数:4
相关论文
共 12 条
[1]  
ALEXANDER H, 1991, MAT SCI TECHNOL, P249
[2]  
DONOLATO C, 1978, OPTIK, V52, P19
[3]  
HALL RN, 1952, PHYS REV, V86, P600
[4]   METAL-INDUCED DISLOCATION NUCLEATION FOR METASTABLE SIGE/SI [J].
HIGGS, V ;
KIGHTLEY, P ;
GOODHEW, PJ ;
AUGUSTUS, PD .
APPLIED PHYSICS LETTERS, 1991, 59 (07) :829-831
[5]  
HIGGS V, 1992, MATER SCI FORUM, V83, P1309, DOI 10.4028/www.scientific.net/MSF.83-87.1309
[6]   ON THE SENSITIVITY OF THE EBIC TECHNIQUE AS APPLIED TO DEFECT INVESTIGATIONS IN SILICON [J].
KITTLER, M ;
SEIFERT, W .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1981, 66 (02) :573-583
[7]   RECOMBINATION ACTIVITY OF MISFIT DISLOCATIONS IN SILICON [J].
KITTLER, M ;
SEIFERT, W ;
HIGGS, V .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1993, 137 (02) :327-335
[8]  
KITTLER M, 1994, MATER SCI ENG B
[9]   ELECTRICAL-ACTIVITY OF DISLOCATIONS - PROSPECTS FOR PRACTICAL UTILIZATION [J].
RADZIMSKI, ZJ ;
ZHOU, TQ ;
BUCZKOWSKI, AB ;
ROZGONYI, GA .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1991, 53 (03) :189-193
[10]   STATISTICS OF THE RECOMBINATIONS OF HOLES AND ELECTRONS [J].
SHOCKLEY, W ;
READ, WT .
PHYSICAL REVIEW, 1952, 87 (05) :835-842