FUNDAMENTAL IRRADIATION PROCESSES RELEVANT TO PLASMA SURFACE TECHNOLOGY

被引：11

作者：

CARTER, G

NOBES, MJ

KATARDJIEV, IV

机构：

来源：

VACUUM | 1988年 / 38卷 / 06期

关键词：

D O I：

10.1016/0042-207X(88)90592-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：479 / 486

页数：8

共 55 条

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