HIGHLY (100)-ORIENTED THIN-FILMS OF SOL-GEL DERIVED PB[(MG1/3NB2/3)(0.675)TI-0.325]O-3 PREPARED ON TEXTURED LANIO3 ELECTRODE

被引:42
作者
SHYU, MJ
HONG, TJ
YANG, TJ
WU, TB
机构
[1] Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 7A期
关键词
FERROELECTRIC FILMS; LANIO3; SOL-GEL; PMNT; PREFERRED ORIENTATION;
D O I
10.1143/JJAP.34.3647
中图分类号
O59 [应用物理学];
学科分类号
摘要
Highly (100)-oriented thin films of Pb[(Mg1/3Nb2/3)(0.675)Ti-0.325]O-3 (PMNT) were fabricated by sol-gel method on (100)-textured LaNiO3 (LNO) metallic oxide electrode. The textured LaNiO3 layer was prepared by rf magnetron sputtering at 250 degrees C on Si, SiO2/Si or Pt/Ti/SiO2/Si substrates. A well orientation match was found between the PMNT and LNO layers. The annealing temperature for obtaining a pure perovskite PMNT film was reduced for about 50 degrees C by using the LNO-coated substrates comparing to that without. A well-developed grain structure was also formed for the former. Satisfactory dielectric and ferroelectric characteristics were observed from the (100)-oriented PMNT thin films prepared at 700 degrees C on LNO, as compared to the randomly oriented one on Pt electrode. However, an increase of annealing temperature would cause a more serious out-diffusion of LNO which gradually deteriorated the property of PMNT films deposited on LNO.
引用
收藏
页码:3647 / 3653
页数:7
相关论文
共 19 条
[1]  
CHEN J, 1993, MATER RES SOC S P, V310, P47
[2]   TEMPERATURE-TIME TEXTURE TRANSITION OF PB(ZR1-XTIX)O-3 THIN-FILMS .2. HEAT-TREATMENT AND COMPOSITIONAL EFFECTS [J].
CHEN, SY ;
CHEN, IW .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (09) :2337-2344
[3]   TEMPERATURE-TIME TEXTURE TRANSITION OF PB(ZR1-XTIX)O-3 THIN-FILMS .1. ROLE OF PB-RICH INTERMEDIATE PHASES [J].
CHEN, SY ;
CHEN, IW .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (09) :2332-2336
[4]   DIELECTRIC AND PYROELECTRIC PROPERTIES IN THE PB(MG1/3NB2/3)O3-PBTIO3 SYSTEM [J].
CHOI, SW ;
SHROUT, TR ;
JANG, SJ ;
BHALLA, AS .
FERROELECTRICS, 1989, 100 :29-38
[5]  
FRANCIS LF, 1990, MATER RES SOC SYMP P, V200, P173, DOI 10.1557/PROC-200-173
[6]   THIN-LAYER DIELECTRICS IN THE PB[(MG1/3NB2/3)1-XTIX]O3 SYSTEM [J].
FRANCIS, LF ;
PAYNE, DA .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (12) :3000-3010
[7]   SOL-GEL PROCESSING AND PROPERTIES OF LEAD MAGNESIUM NIOBATE POWDERS AND THIN-LAYERS [J].
FRANCIS, LF ;
OH, YJ ;
PAYNE, DA .
JOURNAL OF MATERIALS SCIENCE, 1990, 25 (12) :5007-5013
[8]   SYNTHESIS OF PBTIO3 FILM ON LANIO3-COATED SUBSTRATE BY THE SPRAY-ICP TECHNIQUE [J].
ICHINOSE, H ;
NAGANO, M ;
KATSUKI, H ;
TAKAGI, H .
JOURNAL OF MATERIALS SCIENCE, 1994, 29 (19) :5115-5120
[9]   INFLUENCE OF LASER FLUENCE ON STRUCTURAL AND FERROELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED BY LASER ABLATION [J].
KIDOH, H ;
OGAWA, T ;
YASHIMA, H ;
MORIMOTO, A ;
SHIMIZU, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2167-2169
[10]   FERROELECTRIC MEMORIES [J].
LARSEN, PK ;
CUPPENS, R ;
SPIERINGS, GACM .
FERROELECTRICS, 1992, 128 (1-4) :265-292