A COMPARATIVE-STUDY OF THE PROPERTIES OF EVAPORATED A-SI FILMS BEFORE AND AFTER HYDROGENATION

被引：2

作者：

CHICK, KP ^{[1
]}

KOON, KC ^{[1
]}

TONG, BY ^{[1
]}

机构：

[1] UNIV WESTERN ONTARIO, DEPT PHYS, LONDON N6A 3K7, ONTARIO, CANADA

来源：

THIN SOLID FILMS | 1987年 / 147卷 / 02期

关键词：

D O I：

10.1016/0040-6090(87)90286-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：213 / 222

页数：10

共 25 条

[1] PROPERTIES OF AMORPHOUS SILICON FILMS - DEPENDENCE ON DEPOSITION RATE [J].

BAHL, SK ;

BHAGAT, SM ;

GLOSSER, R .

SOLID STATE COMMUNICATIONS, 1973, 13 (08) :1159-1163

[2]

BAHL SK, 1974, AMORPHOUS LIQUID SEM, P69

[3] INFLUENCE OF EVAPORATION PARAMETERS ON ELECTRICAL PROPERTIES OF AMORPHOUS-GERMANIUM AND SILICON [J].

BEYER, W ;

STUKE, J .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 30 (02) :511-520

[4] STRUCTURAL, OPTICAL, AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON FILMS [J].

BRODSKY, MH ;

TITLE, RS ;

WEISER, K ;

PETTIT, GD .

PHYSICAL REVIEW B, 1970, 1 (06) :2632-&

[5]

Carlson D. E., 1979, Amorphous semiconductors, P287

[6] EVIDENCE FOR NEAREST-NEIGHBOR HOPPING IN AMORPHOUS-SILICON [J].

CHIK, KP ;

KOON, KC .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1986, 53 (05) :399-405

[7] PRE-CRYSTALLIZATION ANNEALING STAGE IN AMORPHOUS-GERMANIUM FILMS [J].

CHIK, KP ;

FUNG, SH .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1977, 24 (03) :431-435

[8] GENERATION OF DANGLING BONDS BY HIGH-TEMPERATURE ANNEALING AND HOPPING CONDUCTION IN AMORPHOUS-SILICON FILMS [J].

CHIK, KP ;

FENG, SY ;

POON, SK .

SOLID STATE COMMUNICATIONS, 1980, 33 (10) :1019-1023

[9] PHOTOCONDUCTIVITY OF EVAPORATED AMORPHOUS-SILICON FILMS POST-HYDROGENATED IN A THETA-PINCH PLASMA [J].

CHIK, KP ;

LIM, PK ;

TONG, BY ;

JOHN, PK ;

GOGNA, PK ;

WONG, SK .

PHYSICAL REVIEW B, 1983, 27 (06) :3562-3570

[10] ELECTRON-TRANSPORT IN AMORPHOUS-SEMICONDUCTORS [J].

COHEN, MH ;

ECONOMOU, EN ;

SOUKOULIS, CM .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) :285-290

← 1 2 3 →