LATERAL DOPANT PROFILING WITH 200 NM RESOLUTION BY SCANNING CAPACITANCE MICROSCOPY

被引：173

作者：

WILLIAMS, CC

SLINKMAN, J

HOUGH, WP

WICKRAMASINGHE, HK

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 16期

关键词：

D O I：

10.1063/1.102312

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1662 / 1664

页数：3

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