ELECTRON-BEAM EFFECTS IN THE ANALYSIS OF COMPOUND SEMICONDUCTORS AND DEVICES

被引：7

作者：

KAZMERSKI, LL

BURNHAM, NA

SWARTZLANDER, AB

NELSON, AJ

ASHER, SE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 05期

关键词：

D O I：

10.1116/1.574313

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2814 / 2818

页数：5

共 46 条

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