SATURATION CLUSTER DENSITY IN DEPOSITION OF THIN-FILMS FROM VAPORS

被引：7

作者：

KASHCHIEV, D

机构：

[1] Institute of Physical Chemistry, Bulgarian Academy of Sciences, Sofia

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1979年 / 55卷 / 02期

关键词：

D O I：

10.1002/pssa.2210550204

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A general formula is derived for the saturation cluster density ns of disc‐shaped clusters in deposition of thin films from vapours. In the limiting cases of complete and incomplete condensation, explicit expressions are obtained for the dependence of ns on the deposition rate and the substrate temperature. The results apply to immobile clusters nucleated at atomically high supersaturations on a substrate without active sites. Some of the theoretical findings are compared with existing experimental data for gold and silver deposited onto alkali halide substrates. Copyright © 1979 WILEY‐VCH Verlag GmbH & Co. KGaA

引用

页码：369 / 374

页数：6

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