DISLOCATION NETWORKS IN PHOSPHORUS-IMPLANTED SILICON

被引：46

作者：

TAMURA, M ^{[1
]}

机构：

[1] HITACHI LTD,CENT RES LAB,TOKYO 185,JAPAN

来源：

PHILOSOPHICAL MAGAZINE | 1977年 / 35卷 / 03期

关键词：

D O I：

10.1080/14786437708235998

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：663 / 691

页数：29

共 32 条

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BOOKER, GR ;

TUNSTALL, WJ .

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[4]

CLARK AH, 1968, T METALL SOC AIME, V242, P1173

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RAY, ILF ;

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[6]

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[7]

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[8] A KINEMATICAL THEORY OF DIFFRACTION CONTRAST OF ELECTRON TRANSMISSION MICROSCOPE IMAGES OF DISLOCATIONS AND OTHER DEFECTS [J].

HIRSCH, PB ;

HOWIE, A ;

WHELAN, MJ .

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 252 (1017) :499-&

[9]

HIRTH JP, 1968, THEORY DISLOCATIONS, P506

[10]

IKEDA T, 1975, 6TH P C SOL STAT DEV, P311

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