SPUTTERING OF POLYCRYSTALLINE COPPER + SILVER BY 30-170 KEV ARGON IONS

[21] THE EFFECT OF PHASE CHANGES IN WHITE LIGHT INTERFEROMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1951, 41 (04) : 261 - 264

[22] SUBSTRATE DAMAGE IN FILM THICKNESS MEASUREMENT BY BEAM INTERFEROMETRY [J]. NATURE, 1959, 184 (4683) : 354 - 355

[23] THE THICKNESS MEASUREMENT OF THIN FILMS BY MULTIPLE BEAM INTERFEROMETRY [J]. JOURNAL OF APPLIED PHYSICS, 1950, 21 (09) : 843 - 846

[24] FOCUSING IN COLLISION PROBLEMS IN SOLIDS [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (11) : 1246 - 1250

[25] THOMPSON MW, 1962, IONIZATION PHENOMENA, V1, P85

[26] Tolansky S., 1948, MULTIPLE BEAM INTERF

[27] TOLANSKY S, 1951, J ELECTRODEP TECH SO, V27, P171

[28] ERRORS IN THE MEASUREMENT OF FILM THICKNESS BY MULTIPLE-BEAM INTERFEROMETRY [J]. NATURE, 1958, 182 (4643) : 1149 - 1150

[29] INFLUENCE OF THE ANGLE OF INCIDENCE ON SPUTTERING YIELDS [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) : 1762 - 1765

[30] WEHNER GK, 1955, ADVANCES ELECTRONICS, V7

[21] THE EFFECT OF PHASE CHANGES IN WHITE LIGHT INTERFEROMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1951, 41 (04) : 261 - 264

[22] SUBSTRATE DAMAGE IN FILM THICKNESS MEASUREMENT BY BEAM INTERFEROMETRY [J]. NATURE, 1959, 184 (4683) : 354 - 355

[23] THE THICKNESS MEASUREMENT OF THIN FILMS BY MULTIPLE BEAM INTERFEROMETRY [J]. JOURNAL OF APPLIED PHYSICS, 1950, 21 (09) : 843 - 846

[24] FOCUSING IN COLLISION PROBLEMS IN SOLIDS [J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (11) : 1246 - 1250

[25] THOMPSON MW, 1962, IONIZATION PHENOMENA, V1, P85

[26] Tolansky S., 1948, MULTIPLE BEAM INTERF

[27] TOLANSKY S, 1951, J ELECTRODEP TECH SO, V27, P171

[28] ERRORS IN THE MEASUREMENT OF FILM THICKNESS BY MULTIPLE-BEAM INTERFEROMETRY [J]. NATURE, 1958, 182 (4643) : 1149 - 1150

[29] INFLUENCE OF THE ANGLE OF INCIDENCE ON SPUTTERING YIELDS [J]. JOURNAL OF APPLIED PHYSICS, 1959, 30 (11) : 1762 - 1765

[30] WEHNER GK, 1955, ADVANCES ELECTRONICS, V7