ROUND ROBIN COMPUTER-SIMULATION OF EJECTION PROBABILITY IN SPUTTERING

被引：78

作者：

SIGMUND, P

ROBINSON, MT

BASKES, MI

HAUTALA, M

CUI, FZ

ECKSTEIN, W

YAMAMURA, Y

HOSAKA, S

ISHITANI, T

SHULGA, VI

HARRISON, DE

CHAKAROV, IR

KARPUZOV, DS

KAWATOH, E

SHIMIZU, R

VALKEALAHTI, S

NIEMINEN, RM

BETZ, G

HUSINSKY, W

SHAPIRO, MH

VICANEK, M

URBASSEK, HM

机构：

[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831

[2] SANDIA NATL LABS,LIVERMORE,CA 94540

[3] UNIV HELSINKI,DEPT PHYS,SF-00170 HELSINKI 17,FINLAND

[4] TSINGHUA UNIV BEIJING,DEPT ENGN PHYS,BEIJING,PEOPLES R CHINA

[5] EURATOM ASSOC,MAX PLANCK INST PLASMAPHYS,D-8046 GARCHING,FED REP GER

[6] OKAYAMA UNIV SCI,OKAYAMA 700,JAPAN

[7] HITACHI LTD,CENT RES LAB,KOKUBUNJI,TOKYO 185,JAPAN

[8] MOSCOW STATE UNIV,INST NUCL PHYS,MOSCOW 119899,USSR

[9] USN,POSTGRAD SCH,DEPT PHYS,MONTEREY,CA 93943

[10] BULGARIAN ACAD SCI,INST ELECTR,BU-1784 SOFIA,BULGARIA

[11] OSAKA UNIV,DEPT APPL PHYS,SUITA,OSAKA 565,JAPAN

[12] UNIV JYVASKYLA,DEPT PHYS,SF-40100 JYVASKYLA,FINLAND

[13] VIENNA TECH UNIV,INST ALLGEMEINE PHYS,A-1040 VIENNA,AUSTRIA

[14] CALIF STATE UNIV FULLERTON,DEPT PHYS,FULLERTON,CA 92634

[15] TECH UNIV BRUNSWICK,INST THEORET PHYS,D-3300 BRUNSWICK,FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 36卷 / 02期

关键词：

D O I：

10.1016/0168-583X(89)90573-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：110 / 123

页数：14

共 60 条

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[8] CHAKAROV IR, UNPUB PHYS STATUS B
[9] CUI FZ, 1985, NUCL INSTRUM METH B, V7-8, P650, DOI 10.1016/0168-583X(85)90449-5
[10] A MONTE-CARLO STUDY OF CASCADE FLUCTUATIONS
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